Multi-pulse LIBDE of fused silica at different thicknesses of the organic absorber layer

Laser-induced etching techniques feature several unique characteristics that enable ultraprecise machining of transparent materials. However, LIBDE (laser-induced back side dry etching) and LIBWE (laser-induced back side wet etching) are preferentially studied due to experimental feasibilities eithe...

Teljes leírás

Elmentve itt :
Bibliográfiai részletek
Szerzők: Pan Yunxiang
Ehrhardt Martin
Lorenz Pierre
Han Bing
Hopp Béla
Vass Csaba
Ni Xiaowu
Zimmer Klaus
Dokumentumtípus: Cikk
Megjelent: Elsevier 2015
Sorozat:APPLIED SURFACE SCIENCE 359
doi:10.1016/j.apsusc.2015.10.095

mtmt:3042569
Online Access:http://publicatio.bibl.u-szeged.hu/9091

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