Multi-pulse LIBDE of fused silica at different thicknesses of the organic absorber layer
Laser-induced etching techniques feature several unique characteristics that enable ultraprecise machining of transparent materials. However, LIBDE (laser-induced back side dry etching) and LIBWE (laser-induced back side wet etching) are preferentially studied due to experimental feasibilities eithe...
Elmentve itt :
Szerzők: |
Pan Yunxiang Ehrhardt Martin Lorenz Pierre Han Bing Hopp Béla Vass Csaba Ni Xiaowu Zimmer Klaus |
---|---|
Dokumentumtípus: | Cikk |
Megjelent: |
Elsevier
2015
|
Sorozat: | APPLIED SURFACE SCIENCE
359 |
doi: | 10.1016/j.apsusc.2015.10.095 |
mtmt: | 3042569 |
Online Access: | http://publicatio.bibl.u-szeged.hu/9091 |
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