Fabrication of micro- and submicrometer period metal reflection gratings by melt-imprint technique
In this study we report on a two step method to produce reflection gratings (period: from 266 nm to 3710 nm) in bulk tin (Sn). In our first step, surface relief gratings were etched into fused silica plates by two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) technique based o...
Elmentve itt :
| Szerzők: | |
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| Dokumentumtípus: | Cikk |
| Megjelent: |
2013
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| Sorozat: | JOURNAL OF LASER MICRO NANOENGINEERING
8 No. 3 |
| doi: | 10.2961/jlmn.2013.03.0016 |
| mtmt: | 2530001 |
| Online Access: | http://publicatio.bibl.u-szeged.hu/7927 |